Features

  • T-shape slideways configuration on monolithic flat machined natural granite base
  • High performance hydrostatic guideways for superior damping and positional control
  • High frequency Windows PC based PMAC motion controller
  • Pneumatic isolators for better noise isolation from the ground
  • 1.2nm resolution, thermally stable optical linear encoder feedback
  • LVDT based Tool setter
  • Optical system fro online monitoring
  • High precision aerostatic with independent chiller unit
  • 2 axes X-Z contouring
  • X-Z-C axes Slow Tool Servo Freeform machining
  • X-Z-C-Fast Tool Servo (FTS) axes Freeform, Micro Lens Array (MLA), Micro prism and optics machining
  • Fly-cutting feasibility